Features
- Extremely broad wavelength range:170 nm to 2500 nm
- Long lifetime:10 000 hours
- High radiance from a small plasma
Spectral radiance
Specifications
Parameter | Description / Value | Unit | ||
---|---|---|---|---|
Optical interface① | Diverging beam (Single beam) | - | ||
Wavelength range | 170 to 2500 | nm | ||
Plasma size (FWHM) | Typ. | 125 × 320 | μm | |
Numerical aperture | NA | 0.5 | - | |
Lifetime② | Typ. | 10 000 | h | |
Warm-up time | 30 | min | ||
Laser class | Class 1 | - | ||
Spectral radiance(at 500 nm) | Typ. | 75 | mW/?·sr·nm | |
Broadband optical power | Typ. | 2.75 | W | |
Output window size | Φ22 | mm | ||
Window material③ | Quartz | - | ||
Cooling method | Water cooling④⑤ | - | ||
Nitrogen purge | Required. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG | - | ||
Applicable standards | EN 61010-1 EN 61326-1 IEC 60825-1 IEC 62471 EN 50581 |
- | ||
Device configuration | Lamphead, Power supply controller, Necessary cables | - | ||
Power rating | Input voltage (AC) | 100 to 240 | V | |
Power frequency | 50 / 60 | Hz | ||
Power consumption | 350 | W |
① Dual-beam output mode can be selected as an option.
② Windows may need to be replaced depending on the extent of contamination and usage conditions.
③ YAG (190 nm to 2500 nm) and BK7 (350 nm to 2500 nm) windows are also selectable as options.
④ Cooling water conditions
Lamphead: ≥0.5 L/min, 18 °C to 30 °C, 100 psiG (0.69 MPa) max. inlet pressure
Controller: No cooling required
⑤ A chiller kit is available as an option.